Journal of Physical Chemistry & Biophysics
Open Access
ISSN: 2161-0398
+44 1478 350008
ISSN: 2161-0398
+44 1478 350008
Taerim Yoon, Heesang Ahn, Taeyeon Kim Jong-ryul Choi and Kyujung Kim
Pusan National University, Republic of Korea Daegu-Gyeongbuk Medical Innovation Foundation (DGMIF), Republic of Korea
Posters & Accepted Abstracts: J Phys Chem Biophys
Optical measurement methods are widely employed in both industrial and medical fields for two reasons: optical methods are non-invasive and have a high resolution. Among various optical methods, the method based on spectroscopy is actively applied in monitoring multiple factors from spectral information. Optical microscopes can overcome the disadvantages of these traditional methods to analyze nanoscale components, but they are flawed by diffraction limits that limit imaging resolutions to a few hundred nanometers. To overcome the shortage, post-processing techniques such as deconvolutions were employed, but there were also limitations. Meanwhile, several studies of optical profile inspection systems using confocal or patterned illuminations were also progressed by several research groups, resulting in measurements with improved resolutions. In this research, we investigated an ultrahighresolution optical inspection system for examining fabricated metallic nanostructures using structured illuminations. Images of nanoscale wires and posts reflected in the structured illumination formed by a Liquid-Crystal on Silicon (LCoS) spatial light modulator can be reconstructed to the ultrahighresolution image through post-processing, which shows the improvement of 200 in the lateral image resolution. Comparison with SEM, one of the typical nanostructure imaging instruments, confirms that the investigated system shows high performance and availability as a nanomaterials and nanostructures inspection platform. In particular, since it does not require special environmental conditions such as vacuum and can connect multiple systems into arrays, it saw hope that the optical inspection system can be employed as an inspection equipment for large nanoscale components.
Taerim Yoon is a Ph.D student majoring in Cogno-Mechatronics Engenineering at Pusan National University in Republic of Korea. He also majored in Optics and Mechatronics engineering as a bachelor and in Cogno-Mechatronics engineering as a master’s degree at the same university. He is currently working in the NanoBioPhotonics laboratory under the guidance of professor Kyujung Kim. NanoBioPhotonics Laboratory investigates plasmon based optical imaging system and optical sensing techniques to visualize molecular interactions in biological applications, and interests in developments of optical imaging devices. Here, he is studying to develop a high resolution imaging system for nano biophotonics using structured illumination.
E-mail: dbsxofla2@gmail.com